Use Vec.apply, not Vec.fill, for type nodes

uncore/src/main/scala/uncore.scala

@@ -50,7 +50,7 @@ trait HasCoherenceAgentWiringHelpers {
 
 trait HasInnerTLIO extends CoherenceAgentBundle {
   val inner = Bundle(new ManagerTileLinkIO)(innerTLParams)
-  val incoherent = Vec.fill(inner.tlNCachingClients){Bool()}.asInput
+  val incoherent = Vec(Bool(), inner.tlNCachingClients).asInput
   def iacq(dummy: Int = 0) = inner.acquire.bits
   def iprb(dummy: Int = 0) = inner.probe.bits
   def irel(dummy: Int = 0) = inner.release.bits